Photoresist Coated Filter Element
Built from premium stainless steel (SS304/SS316L), this pleated high flow water filter delivers reliable performance under high temperature and pressure conditions. Its high flow rate efficiently handles large volumes of water, while its durable construction ensures a long service life.
- Optimized for complete wetting with low hold-up volume and quick venting
- Low differential pressure for consistent flow performance
- Captured O-ring for easy filter changeouts, manufactured in a cleanroom environment
- Compatible with most older photoresist dispense systems
- Flow Rate
- 500 GPM
- Micron Rating
- 5, 10, 25 μm
- Max Temperature
- up to 80°C
Shrinking line widths in IC manufacturing place ever-increasing demands on contamination control across every step of semiconductor fabrication.
Point-of-use (POU) filtration of photoresists is one of the primary methods used to control particle contamination on the wafer surface during coating operations.
The push toward tighter filtration has introduced 0.05µm membranes alongside traditional 0.10µm membranes for photoresist dispensing.
End-users sometimes raise concerns that tighter filtration may damage the photoresist itself — altering molecular weight, viscosity, or photosensitivity.
This study evaluates 0.05µm and 0.10µm Pall Falcon® filters dispensing Microposit S1813 photoresist to reduce surface defects on the wafer.
Gel permeation chromatography (GPC) on filtered and unfiltered photoresist showed no change in the molecular weight of the photosensitive components.
Viscosity and coating-thickness measurements showed no loss in solids that would affect coating thickness on the wafer.
G-line exposure demonstrated retention of photospeed, confirming no damage to the resin or photosensitive components.
The results demonstrate that filtration is a positive step toward lower wafer-surface contamination without compromising photoresist performance.
Why Choose Pullner Filter?
More than just a supplier – we’re your technical partner in filtration solutions
Laboratory and Testing Facilities
In-house testing capabilities for materials and quality assurance with advanced equipment and certified technicians.
- Particle counting analysis
- Pressure drop testing
- Material compatibility testing
Design and R&D Services
Position as technical partner, not just supplier. Custom solutions for your unique challenges.
- Custom filter design
- System optimization
- Technical consultation
Free Services
Comprehensive free services to support your filtration needs without any hidden costs.
- Free testing for filtration systems
- Free custom filtration design
- Up to 2 free samples
Global Manufacturing
State-of-the-art manufacturing facilities with worldwide delivery capabilities and local support.
- ISO 9001 certified facilities
- Global logistics network
- Local technical support
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